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Isolation of nanowires made on bulk wafers by ground plane doping

dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorMertens, Hans
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorMitard, Jerome
dc.contributor.authorMocuta, Dan
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-24T12:13:24Z
dc.date.available2021-10-24T12:13:24Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29303
dc.sourceIIOimport
dc.titleIsolation of nanowires made on bulk wafers by ground plane doping
dc.typeProceedings paper
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage300
dc.source.endpage303
dc.source.conference47th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate11/09/2017
dc.source.conferencelocationLeuven Beligium
dc.identifier.urlhttp://ieeexplore.ieee.org/document/8066651/
imec.availabilityPublished - open access


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