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Double MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure range
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Double MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure range
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Date
2017
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rochus, Veronique
;
Jansen, Roelof
;
Figeys, Bruno
;
Verhaegen, Fabian
;
Rosseel, Robrect
;
Merken, Patrick
;
Lenci, Silvia
;
Rottenberg, Xavier
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2015
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Views
2015
since deposited on 2021-10-24
3
last month
2
last week
Acq. date: 2025-12-12
Citations