Authors

Rochus, Veronique; Jansen, Roelof; Figeys, Bruno; Verhaegen, Fabian; Rosseel, Robrect; Merken, Patrick; Lenci, Silvia; Rottenberg, Xavier

Conference

19th International Conference on Transducers, Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS

Title

Double MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure range

Publication type

Proceedings paper

Embargo date

9999-12-31