Publication:

Modelling and design of micro-opto-mechanical pressure sensors in the presence of residual stresses

Date

2017

Proceedings Paper

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Files

35860.pdf 8.47 MB

Author(s)

Rochus, Veronique

;

;

Haouari, Rachid

;

;

Mukund, Vignesh

;

Verhaegen, Fabian

;

Goyvaerts, Jeroen

;

Neutens, Pieter

;

O'Callaghan, John

;

;

;

Rottenberg, Xavier

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Acq. date: 2026-05-20