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Modelling and design of micro-opto-mechanical pressure sensors in the presence of residual stresses
Publication:
Modelling and design of micro-opto-mechanical pressure sensors in the presence of residual stresses
Date
2017
Proceedings Paper
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35860.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rochus, Veronique
;
Jansen, Roelof
;
Haouari, Rachid
;
Figeys, Bruno
;
Mukund, Vignesh
;
Verhaegen, Fabian
;
Goyvaerts, Jeroen
;
Neutens, Pieter
;
O'Callaghan, John
;
Stassen, Andim
;
Lenci, Silvia
;
Rottenberg, Xavier
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2069
since deposited on 2021-10-24
Acq. date: 2025-10-27
Citations
Metrics
Views
2069
since deposited on 2021-10-24
Acq. date: 2025-10-27
Citations