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CMOS fabricated large array of free standing substrate-less photonic crystal cavities for biosensing applications

dc.contributor.authorSaurav, Kumar
dc.contributor.authorKumari, Sulakshna
dc.contributor.authorLe Thomas, Nicolas
dc.date.accessioned2021-10-24T12:57:15Z
dc.date.available2021-10-24T12:57:15Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29379
dc.sourceIIOimport
dc.titleCMOS fabricated large array of free standing substrate-less photonic crystal cavities for biosensing applications
dc.typeProceedings paper
dc.contributor.imecauthorKumari, Sulakshna
dc.contributor.imecauthorLe Thomas, Nicolas
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage493
dc.source.endpage501
dc.source.conferenceIEEE Photonics Conference. 30th Annual Conference of the IEEE Photonics Society - IPC
dc.source.conferencedate1/10/2017
dc.source.conferencelocationLake Buena Vista, FL USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8116198/
imec.availabilityPublished - open access
imec.internalnotesISBN 978-1-5090-6577-6


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