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WS2 transistors on 300 mm wafers with BEOL compatibility

dc.contributor.authorSchram, Tom
dc.contributor.authorSmets, Quentin
dc.contributor.authorGroven, Benjamin
dc.contributor.authorHeyne, Markus
dc.contributor.authorKunnen, Eddy
dc.contributor.authorThiam, Arame
dc.contributor.authorDevriendt, Katia
dc.contributor.authorDelabie, Annelies
dc.contributor.authorLin, Dennis
dc.contributor.authorLux, Marcel
dc.contributor.authorChiappe, Daniele
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorBrus, Stephan
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorSayan, Safak
dc.contributor.authorJuncker, Aurélie
dc.contributor.authorCaymax, Matty
dc.contributor.authorRadu, Iuliana
dc.date.accessioned2021-10-24T13:05:01Z
dc.date.available2021-10-24T13:05:01Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29392
dc.sourceIIOimport
dc.titleWS2 transistors on 300 mm wafers with BEOL compatibility
dc.typeProceedings paper
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorSmets, Quentin
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorThiam, Arame
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecSmets, Quentin::0000-0002-2356-5915
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage212
dc.source.endpage215
dc.source.conference47th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate11/09/2017
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttp://ieeexplore.ieee.org/document/8066629/
imec.availabilityPublished - open access


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