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Observation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structures

dc.contributor.authorSchulze, Andreas
dc.contributor.authorLoo, Roger
dc.contributor.authorRyan, Paul
dc.contributor.authorWormington, Matthew
dc.contributor.authorFavia, Paola
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorCollaert, Nadine
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-24T13:10:13Z
dc.date.available2021-10-24T13:10:13Z
dc.date.issued2017
dc.identifier.issn0957-4484
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29400
dc.sourceIIOimport
dc.titleObservation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structures
dc.typeJournal article
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewyes
dc.source.beginpage145703
dc.source.journalNanotechnology
dc.source.issue14
dc.source.volume28
dc.identifier.urlhttp://iopscience.iop.org/article/10.1088/1361-6528/aa5fbb/pdf
imec.availabilityPublished - imec


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