Authors

Schulze, Andreas; Loo, Roger; Ryan, Paul; Wormington, Matthew; Favia, Paola; Witters, Liesbeth; Collaert, Nadine; Vandervorst, Wilfried; Caymax, Matty

ISSN

0957-4484

Issue

14

Journal

Nanotechnology

Volume

28

Title

Observation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structures

Publication type

Journal article