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Observation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structures
Publication:
Observation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structures
Date
2017
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schulze, Andreas
;
Loo, Roger
;
Ryan, Paul
;
Wormington, Matthew
;
Favia, Paola
;
Witters, Liesbeth
;
Collaert, Nadine
;
Vandervorst, Wilfried
;
Caymax, Matty
Journal
Nanotechnology
Abstract
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2005
since deposited on 2021-10-24
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Acq. date: 2025-10-25
Citations
Metrics
Views
2005
since deposited on 2021-10-24
472
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations