Observation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structures

dc.contributor.author	Schulze, Andreas
dc.contributor.author	Loo, Roger
dc.contributor.author	Ryan, Paul
dc.contributor.author	Wormington, Matthew
dc.contributor.author	Favia, Paola
dc.contributor.author	Witters, Liesbeth
dc.contributor.author	Collaert, Nadine
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Caymax, Matty
dc.contributor.imecauthor	Loo, Roger
dc.contributor.imecauthor	Favia, Paola
dc.contributor.imecauthor	Witters, Liesbeth
dc.contributor.imecauthor	Collaert, Nadine
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.imecauthor	Caymax, Matty
dc.contributor.orcidimec	Loo, Roger::0000-0003-3513-6058
dc.contributor.orcidimec	Favia, Paola::0000-0002-1019-3497
dc.contributor.orcidimec	Collaert, Nadine::0000-0002-8062-3165
dc.date.accessioned	2021-10-24T13:10:13Z
dc.date.available	2021-10-24T13:10:13Z
dc.date.issued	2017
dc.identifier.issn	0957-4484
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/29400
dc.identifier.url	http://iopscience.iop.org/article/10.1088/1361-6528/aa5fbb/pdf
dc.source.beginpage	145703
dc.source.issue	14
dc.source.journal	Nanotechnology
dc.source.volume	28
dc.title	Observation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structures
dc.type	Journal article
dspace.entity.type	Publication
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