Show simple item record

Strain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffraction

dc.contributor.authorSchulze, Andreas
dc.contributor.authorLoo, Roger
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorMertens, Hans
dc.contributor.authorGawlik, Andrzej
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorCollaert, Nadine
dc.contributor.authorWormington, Matthew
dc.contributor.authorRyan, Paul
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-24T13:11:34Z
dc.date.available2021-10-24T13:11:34Z
dc.date.issued2017
dc.identifier.issn1610-1634
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29402
dc.sourceIIOimport
dc.titleStrain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffraction
dc.typeJournal article
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorGawlik, Andrzej
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecGawlik, Andrzej::0000-0002-6540-2735
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewyes
dc.source.beginpage1700156
dc.source.journalPhysica Status Solidi C
dc.source.issue12
dc.source.volume14
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201700156/full
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record