Strain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffraction

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Author(s)

Schulze, Andreas

;

;

Witters, Liesbeth

;

;

Gawlik, Andrzej

;

Horiguchi, Naoto

;

Collaert, Nadine

;

Wormington, Matthew

;

;

Vandervorst, Wilfried

;

Journal

Physica Status Solidi C

Metrics

1961 since deposited on 2021-10-24

Acq. date: 2025-10-28