Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Strain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffraction
Publication:
Strain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffraction
Date
2017
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schulze, Andreas
;
Loo, Roger
;
Witters, Liesbeth
;
Mertens, Hans
;
Gawlik, Andrzej
;
Horiguchi, Naoto
;
Collaert, Nadine
;
Wormington, Matthew
;
Ryan, Paul
;
Vandervorst, Wilfried
;
Caymax, Matty
Journal
Physica Status Solidi C
Abstract
Description
Metrics
Views
1961
since deposited on 2021-10-24
465
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1961
since deposited on 2021-10-24
465
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations