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Strain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffraction

Date

2017
Journal article
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dc.contributor.authorSchulze, Andreas
dc.contributor.authorLoo, Roger
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorMertens, Hans
dc.contributor.authorGawlik, Andrzej
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorCollaert, Nadine
dc.contributor.authorWormington, Matthew
dc.contributor.authorRyan, Paul
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorGawlik, Andrzej
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecGawlik, Andrzej::0000-0002-6540-2735
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-24T13:11:34Z
dc.date.available2021-10-24T13:11:34Z
dc.date.issued2017
dc.identifier.issn1610-1634
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29402
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201700156/full
dc.source.beginpage1700156
dc.source.issue12
dc.source.journalPhysica Status Solidi C
dc.source.volume14
dc.title

Strain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffraction

dc.typeJournal article
dspace.entity.typePublication
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