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Surface preparation and wet cleaning for germanium surface

dc.contributor.authorShirakawa, Hajime
dc.contributor.authorSnow, j.
dc.contributor.authorOtsuji, M.
dc.contributor.authorYoshida, Y.
dc.contributor.authorTakahashi, H.
dc.contributor.authorSebaai, Farid
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorSato, M.
dc.date.accessioned2021-10-24T13:29:55Z
dc.date.available2021-10-24T13:29:55Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29432
dc.sourceIIOimport
dc.titleSurface preparation and wet cleaning for germanium surface
dc.typeProceedings paper
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorHolsteyns, Frank
dc.source.peerreviewyes
dc.source.beginpage170
dc.source.endpage180
dc.source.conferenceSurface Preparation and Cleaning Conference - SPCC
dc.source.conferencedate28/03/2017
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - imec


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