Self-focusing SIMS: a novel metrology for area-selective deposition

dc.contributor.author	Spampinato, Valentina
dc.contributor.author	Armini, Silvia
dc.contributor.author	Franquet, Alexis
dc.contributor.author	Conard, Thierry
dc.contributor.author	Vandervorst, Wilfried
dc.date.accessioned	2021-10-24T13:57:59Z
dc.date.available	2021-10-24T13:57:59Z
dc.date.issued	2017
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/29477
dc.source	IIOimport
dc.title	Self-focusing SIMS: a novel metrology for area-selective deposition
dc.type	Meeting abstract
dc.contributor.imecauthor	Spampinato, Valentina
dc.contributor.imecauthor	Armini, Silvia
dc.contributor.imecauthor	Franquet, Alexis
dc.contributor.imecauthor	Conard, Thierry
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Spampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimec	Armini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimec	Franquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimec	Conard, Thierry::0000-0002-4298-5851
dc.date.embargo	9999-12-31
dc.source.peerreview	yes
dc.source.beginpage	217
dc.source.conference	21st International Conference on Secondaary Ion Mass Spectrometry - SIMS21
dc.source.conferencedate	10/09/2017
dc.source.conferencelocation	Krakow Poland
dc.identifier.url	http://sims.confer.uj.edu.pl/boa_oral.php?id=147
imec.availability	Published - open access
imec.internalnotes	oral presentation (SN3-Thu4-2-5)