A combined SPM/TOFSIMS tool to obtain real chemical 3D information

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Authors
Spampinato, Valentina; Dialameh, Masoud; Fleischmann, Claudia; Franquet, Alexis; Conard, Thierry; Vandervorst, Wilfried
Conference
21st International Conference on Secondary Ion Mass Spectrometry - SIMS21
Title
A combined SPM/TOFSIMS tool to obtain real chemical 3D information
Publication type
Meeting abstract
Embargo date
9999-12-31
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