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Non-destructive characterization of the uniformity of thin cobalt disilicide films by Raman microprobe measurements

dc.contributor.authorPérez-Rodríguez, A.
dc.contributor.authorRoca, Elisenda
dc.contributor.authorJawhari, T.
dc.contributor.authorMorante, J. R.
dc.contributor.authorSchreutelkamp, Rob
dc.date.accessioned2021-09-29T12:45:19Z
dc.date.available2021-09-29T12:45:19Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/294
dc.sourceIIOimport
dc.titleNon-destructive characterization of the uniformity of thin cobalt disilicide films by Raman microprobe measurements
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage45
dc.source.endpage50
dc.source.journalThin Solid Films
dc.source.volume251
imec.availabilityPublished - open access


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