Authors

Pérez-Rodríguez, A.; Roca, Elisenda; Jawhari, T.; Morante, J. R.; Schreutelkamp, Rob

Journal

Thin Solid Films

Volume

251

Title

Non-destructive characterization of the uniformity of thin cobalt disilicide films by Raman microprobe measurements

Publication type

Journal article

Embargo date

9999-12-31