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Non-destructive characterization of the uniformity of thin cobalt disilicide films by Raman microprobe measurements
Publication:
Non-destructive characterization of the uniformity of thin cobalt disilicide films by Raman microprobe measurements
Date
1994
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pérez-Rodríguez, A.
;
Roca, Elisenda
;
Jawhari, T.
;
Morante, J. R.
;
Schreutelkamp, Rob
Journal
Thin Solid Films
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2181
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
2181
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations