dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Poyai, Amporn | |
dc.contributor.author | Claeys, Cor | |
dc.contributor.author | Czerwinski, A. | |
dc.date.accessioned | 2021-10-01T08:56:44Z | |
dc.date.available | 2021-10-01T08:56:44Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2952 | |
dc.source | IIOimport | |
dc.title | P-N junction diagnostics of the electrical epi-layer quality: a feasibility study | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 410 | |
dc.source.endpage | 420 | |
dc.source.conference | Proceedings of the 5th International Symposium on High Purity Silicon V | |
dc.source.conferencedate | 2/11/1998 | |
dc.source.conferencelocation | Boston, MA USA | |
imec.availability | Published - open access | |