Show simple item record

P-N junction diagnostics of the electrical epi-layer quality: a feasibility study

dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorClaeys, Cor
dc.contributor.authorCzerwinski, A.
dc.date.accessioned2021-10-01T08:56:44Z
dc.date.available2021-10-01T08:56:44Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2952
dc.sourceIIOimport
dc.titleP-N junction diagnostics of the electrical epi-layer quality: a feasibility study
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage410
dc.source.endpage420
dc.source.conferenceProceedings of the 5th International Symposium on High Purity Silicon V
dc.source.conferencedate2/11/1998
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
2586.pdf
Size:
498.7Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record