Authors

Simoen, Eddy; Poyai, Amporn; Claeys, Cor; Czerwinski, A.; Gaubas, Eugenijus

Conference

2nd International Conference on Materials for Microelectronics - ICMM

Title

Diode assessment of material characteristics in internally gettered and non-gettered Czochralski silicon: problems, pitfalls and guidelines

Publication type

Proceedings paper

Embargo date

9999-12-31