Solving the BEOL compatibility challenge of top-pinned magnetic tunnel junction stacks

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Authors
Swerts, Johan; Liu, Enlong; Couet, Sebastien; Mertens, Sofie; Rao, Siddharth; Kim, Woojin; Garello, Kevin; Souriau, Laurent; Kundu, Shreya; Crotti, Davide; Yasin, Farrukh; Jossart, Nico; Sakhare, Sushil; Devolder, Thibaut; Van Beek, Simon; O'Sullivan, Barry; Van Elshocht, Sven; Furnemont, Arnaud; Kar, Gouri Sankar
Conference
IEEE International Electron Devices Meeting - IEDM
Title
Solving the BEOL compatibility challenge of top-pinned magnetic tunnel junction stacks
Publication type
Proceedings paper
Embargo date
9999-12-31
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