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In depth analysis of 3D NAND enablers in gate stack integration and demonstration in 3D devices

dc.contributor.authorTan, Chi Lim
dc.contributor.authorLavizzari, Simone
dc.contributor.authorBlomme, Pieter
dc.contributor.authorBreuil, Laurent
dc.contributor.authorVecchio, Emma
dc.contributor.authorSebaai, Farid
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorTao, Zheng
dc.contributor.authorSchepers, Bart
dc.contributor.authorNyns, Laura
dc.contributor.authorPeter, Antony
dc.contributor.authorDekkers, Harold
dc.contributor.authorOng, Patrick
dc.contributor.authorTsvetanova, Diana
dc.contributor.authorDevriendt, Katia
dc.contributor.authorTeugels, Lieve
dc.contributor.authorHeylen, Nancy
dc.contributor.authorRaymaekers, Tom
dc.contributor.authorJossart, Nico
dc.contributor.authorMennella, Pasquale
dc.contributor.authorDelhougne, Romain
dc.contributor.authorVadakupudhu Palayam, Senthil
dc.contributor.authorArreghini, Antonio
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorFurnemont, Arnaud
dc.date.accessioned2021-10-24T14:44:02Z
dc.date.available2021-10-24T14:44:02Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29550
dc.sourceIIOimport
dc.titleIn depth analysis of 3D NAND enablers in gate stack integration and demonstration in 3D devices
dc.typeProceedings paper
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorTsvetanova, Diana
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorJossart, Nico
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorVadakupudhu Palayam, Senthil
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conferenceInternational Memory Workshop
dc.source.conferencedate14/05/2017
dc.source.conferencelocationMonterey, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7939090/
imec.availabilityPublished - open access


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