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WS2 chemical vapor deposition with WF6 and H2S: influence of the substrate
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Authors
Tomczak, Yoann
;
Groven, Benjamin
;
Caymax, Matty
;
Van Elshocht, Sven
;
Radu, Iuliana
;
Delabie, Annelies
Conference
Joint EuroCVD - Baltic ALD
Title
WS2 chemical vapor deposition with WF6 and H2S: influence of the substrate
Publication type
Meeting abstract
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