Publication:

Etch process modules development and integration in 3D SOC applications

Date

2017
Meeting abstract
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Author(s)

Tutunjyan, Nina  
;
Sardo, Stefano  
;
De Vos, Joeri  
;
Van Huylenbroeck, Stefaan  
;
Jourdain, Anne  
;
Peng, Lan  
;
Inoue, Fumihiro  
;
Rassoul, Nouredine  
;
Beyer, Gerald  
;
Beyne, Eric  
;
Miller, Andy  
;
Piumi, Daniele  
;
Walsby, Edward  
;
Ansell, Oliver
;
Ashraf, Huma
;
Thomas, Dave

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2013 since deposited on 2021-10-24
Acq. date: 2026-01-09

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2013 since deposited on 2021-10-24
Acq. date: 2026-01-09

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