Etch process modules development and integration in 3D SOC applications

Thumbnail
Metadata
Show full item record
Authors
Tutunjyan, Nina; Sardo, Stefano; De Vos, Joeri; Van Huylenbroeck, Stefaan; Jourdain, Anne; Peng, Lan; Inoue, Fumihiro; Rassoul, Nouredine; Beyer, Gerald; Beyne, Eric; Miller, Andy; Piumi, Daniele; Walsby, Edward; Ansell, Oliver; Ashraf, Huma; Thomas, Dave
Conference
10th International Workshop on Plasma Etch and Strip in Microtechnology - PESM
Title
Etch process modules development and integration in 3D SOC applications
Publication type
Meeting abstract
Collections