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Extending the Cu metallization and alternatives

dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorWilson, Chris
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorStruyf, Herbert
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-24T15:56:40Z
dc.date.available2021-10-24T15:56:40Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29665
dc.sourceIIOimport
dc.titleExtending the Cu metallization and alternatives
dc.typeProceedings paper
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewno
dc.source.conferenceAdvanced Metallization Conference - AMC
dc.source.conferencedate13/09/2017
dc.source.conferencelocationAustin, TX USA
dc.identifier.urlhttp://www.advancedmetallizationconference.com/uploads/1/5/5/5/15550226/amc_2017_program_final3.pdf
imec.availabilityPublished - imec


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