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dc.contributor.authorvan Dorp, Dennis
dc.contributor.authorMannarino, Manuel
dc.contributor.authorArnauts, Sophia
dc.contributor.authorBender, Hugo
dc.contributor.authorMerckling, Clement
dc.contributor.authorMoussa, Alain
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSchulze, Andreas
dc.date.accessioned2021-10-24T15:58:03Z
dc.date.available2021-10-24T15:58:03Z
dc.date.issued2017
dc.identifier.issn2073-4352
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29667
dc.sourceIIOimport
dc.titleEpitaxial defects in nanoscale InP Fin structures revealed by wet-chemical etching
dc.typeJournal article
dc.contributor.imecauthorvan Dorp, Dennis
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecvan Dorp, Dennis::0000-0002-1085-4232
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage98
dc.source.journalCrystals
dc.source.issue4
dc.source.volume7
dc.identifier.urlhttp://www.mdpi.com/2073-4352/7/4/98
imec.availabilityPublished - open access


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