Epitaxial defects in nanoscale InP Fin structures revealed by wet-chemical etching

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Authors

van Dorp, Dennis; Mannarino, Manuel; Arnauts, Sophia; Bender, Hugo; Merckling, Clement; Moussa, Alain; Vandervorst, Wilfried; Schulze, Andreas

ISSN

2073-4352

Issue

4

Journal

Crystals

Volume

7

Title

Epitaxial defects in nanoscale InP Fin structures revealed by wet-chemical etching

Publication type

Journal article

Embargo date

9999-12-31

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