Publication:

Epitaxial defects in nanoscale InP Fin structures revealed by wet-chemical etching

Date

2017
Journal article
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dc.contributor.authorvan Dorp, Dennis
dc.contributor.authorMannarino, Manuel
dc.contributor.authorArnauts, Sophia
dc.contributor.authorBender, Hugo
dc.contributor.authorMerckling, Clement
dc.contributor.authorMoussa, Alain
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorSchulze, Andreas
dc.contributor.imecauthorvan Dorp, Dennis
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecvan Dorp, Dennis::0000-0002-1085-4232
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.date.accessioned2021-10-24T15:58:03Z
dc.date.available2021-10-24T15:58:03Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.issn2073-4352
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29667
dc.identifier.urlhttp://www.mdpi.com/2073-4352/7/4/98
dc.source.beginpage98
dc.source.issue4
dc.source.journalCrystals
dc.source.volume7
dc.title

Epitaxial defects in nanoscale InP Fin structures revealed by wet-chemical etching

dc.typeJournal article
dspace.entity.typePublication
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