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Effects of low-thermal-budget treatments on the porous silicon material properties

dc.contributor.authorStalmans, Lieven
dc.contributor.authorPoortmans, Jef
dc.contributor.authorBender, Hugo
dc.contributor.authorJin, S.
dc.contributor.authorConard, Thierry
dc.contributor.authorDebarge, L.
dc.contributor.authorSlaoui, A.
dc.contributor.authorNijs, Johan
dc.date.accessioned2021-10-01T09:00:34Z
dc.date.available2021-10-01T09:00:34Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2970
dc.sourceIIOimport
dc.titleEffects of low-thermal-budget treatments on the porous silicon material properties
dc.typeProceedings paper
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.beginpage30
dc.source.endpage31
dc.source.conference1st Porous Semiconductors - Science and Technology Conference; March 16-20, 1998; Mallorca, Spain.
dc.source.conferencelocation
imec.availabilityPublished - imec


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