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Finite element simulations of the mechanical stress in and around TiSi2 lines

dc.contributor.authorSteegen, An
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorMaex, Karen
dc.contributor.authorIgnat, M.
dc.date.accessioned2021-10-01T09:01:13Z
dc.date.available2021-10-01T09:01:13Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2973
dc.sourceIIOimport
dc.titleFinite element simulations of the mechanical stress in and around TiSi2 lines
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage227
dc.source.endpage232
dc.source.conferenceMicromechanical Structures for Materials Research
dc.source.conferencedate15/04/1998
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access
imec.internalnotesMRS Symposium Proceedings; Vol. 518


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