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Local mechanical stress induced defects for Ti and Co/Ti silicidation in sub-0.25μm MOS-technologies
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Authors
Steegen, An
;
Maex, Karen
;
De Wolf, Ingrid
Conference
IEEE VLSI Technology Symposium
Title
Local mechanical stress induced defects for Ti and Co/Ti silicidation in sub-0.25μm MOS-technologies
Publication type
Proceedings paper
Embargo date
9999-12-31
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