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Advances on doping strategies for triple-gate FinFETs and lateral gate-all-around nanowire FETs and their impact on device performance
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Authors
Veloso, Anabela
;
De Keersgieter, An
;
Matagne, Philippe
;
Horiguchi, Naoto
;
Collaert, Nadine
ISSN
1369-8001
Journal
Materials Science in Semiconductor Processing
Volume
62
Title
Advances on doping strategies for triple-gate FinFETs and lateral gate-all-around nanowire FETs and their impact on device performance
Publication type
Journal article
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