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Stacked nanosheet fork architecture for SRAM design and device co-optimization toward 3nm

dc.contributor.authorWeckx, Pieter
dc.contributor.authorRyckaert, Julien
dc.contributor.authorPutcha, Vamsi
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorJang, Doyoung
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorGarcia Bardon, Marie
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorKim, Ryan Ryoung han
dc.contributor.authorSpessot, Alessio
dc.contributor.authorVerkest, Diederik
dc.contributor.authorMocuta, Anda
dc.date.accessioned2021-10-24T18:44:57Z
dc.date.available2021-10-24T18:44:57Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29917
dc.sourceIIOimport
dc.titleStacked nanosheet fork architecture for SRAM design and device co-optimization toward 3nm
dc.typeProceedings paper
dc.contributor.imecauthorWeckx, Pieter
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorPutcha, Vamsi
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorGarcia Bardon, Marie
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecPutcha, Vamsi::0000-0003-1907-5486
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.source.peerreviewyes
dc.source.beginpage505
dc.source.endpage508
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate2/12/2017
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/document/8268430/
imec.availabilityPublished - imec


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