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Extracting fabricated geometry on die-level

dc.contributor.authorXing, Yufei
dc.contributor.authorKhan, Umar
dc.contributor.authorYe, Yinghao
dc.contributor.authorBogaerts, Wim
dc.date.accessioned2021-10-24T19:24:37Z
dc.date.available2021-10-24T19:24:37Z
dc.date.issued2017-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29972
dc.sourceIIOimport
dc.titleExtracting fabricated geometry on die-level
dc.typeProceedings paper
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage148
dc.source.endpage151
dc.source.conferenceProceedings Symposium IEEE Photonics Society Benelux
dc.source.conferencedate27/11/2017
dc.source.conferencelocationDelft The Netherlands
imec.availabilityPublished - open access


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