Laser assisted patterning of a-Si:H: detailed investigation of laser damage

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Authors

Xu, Menglei; Bearda, Twan; Sivaramakrishnan Radhakrishnan, Hariharsudan; Filipic, Miha; Gordon, Ivan; Debucquoy, Maarten; Szlufcik, Jozef; Poortmans, Jef

ISSN

1862-6254

Issue

9

Journal

Physica Status Solidi. Rapid Research Letters

Volume

11

Title

Laser assisted patterning of a-Si:H: detailed investigation of laser damage

Publication type

Journal article

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