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Laser assisted patterning of a-Si:H: detailed investigation of laser damage

dc.contributor.authorXu, Menglei
dc.contributor.authorBearda, Twan
dc.contributor.authorSivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.authorFilipic, Miha
dc.contributor.authorGordon, Ivan
dc.contributor.authorDebucquoy, Maarten
dc.contributor.authorSzlufcik, Jozef
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-24T19:28:58Z
dc.date.available2021-10-24T19:28:58Z
dc.date.issued2017
dc.identifier.issn1862-6254
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29978
dc.sourceIIOimport
dc.titleLaser assisted patterning of a-Si:H: detailed investigation of laser damage
dc.typeJournal article
dc.contributor.imecauthorSivaramakrishnan Radhakrishnan, Hariharsudan
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorDebucquoy, Maarten
dc.contributor.imecauthorSzlufcik, Jozef
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecSivaramakrishnan Radhakrishnan, Hariharsudan::0000-0003-1963-273X
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecDebucquoy, Maarten::0000-0001-5980-188X
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.beginpage1700125
dc.source.journalPhysica Status Solidi. Rapid Research Letters
dc.source.issue9
dc.source.volume11
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssr.201700125/abstract
imec.availabilityPublished - imec


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