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Challenges in wet processing of high aspect ratio nanostructures

dc.contributor.authorXu, XiuMei
dc.date.accessioned2021-10-24T19:31:06Z
dc.date.available2021-10-24T19:31:06Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29981
dc.sourceIIOimport
dc.titleChallenges in wet processing of high aspect ratio nanostructures
dc.typeMeeting abstract
dc.contributor.imecauthorXu, XiuMei
dc.contributor.orcidimecXu, XiuMei::0000-0002-3356-8693
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceSemicon Korea
dc.source.conferencedate8/02/2017
dc.source.conferencelocationSeoul Korea
dc.identifier.urlwww.semiconkorea.org/en/sites/...org/files/.../Abstract%20Xu.pdf
imec.availabilityPublished - open access


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