Publication:

Fundamental analysis of the collapse of nano-patterns during wet-processing of advanced interconnects

Date

2017

Presentation

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Author(s)

Zahedmanesh, Houman

;

;

Vanstreels, Kris

;

Gonzalez, Mario

;

Statistics

1923 since deposited on 2021-10-24

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Acq. date: 2026-04-06