Nucleation and growth mechanisms of Al2O3 ALD on synthetic polycrystalline MoS2

Zhang, Haodong; Chiappe, Daniele; Meersschaut, Johan; Conard, Thierry; Franquet, Alexis; Nuytten, Thomas; Mannarino, Manuel; Radu, Iuliana; Vandervorst, Wilfried; Delabie, Annelies

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Nucleation and growth mechanisms of Al2O3 ALD on synthetic polycrystalline MoS2

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2017

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Vandervorst, Wilfried

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Delabie, Annelies

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Journal of Chemical Physics

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Nucleation and growth mechanisms of Al2O3 ALD on synthetic polycrystalline MoS2

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