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Nucleation and growth mechanisms of Al2O3 ALD on synthetic polycrystalline MoS2

dc.contributor.authorZhang, Haodong
dc.contributor.authorChiappe, Daniele
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorNuytten, Thomas
dc.contributor.authorMannarino, Manuel
dc.contributor.authorRadu, Iuliana
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-24T19:55:48Z
dc.date.available2021-10-24T19:55:48Z
dc.date.issued2017
dc.identifier.issn0021-9606
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30015
dc.sourceIIOimport
dc.titleNucleation and growth mechanisms of Al2O3 ALD on synthetic polycrystalline MoS2
dc.typeJournal article
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage52810
dc.source.journalJournal of Chemical Physics
dc.source.issue5
dc.source.volume146
dc.identifier.urlhttp://aip.scitation.org/doi/full/10.1063/1.4967406
imec.availabilityPublished - open access


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