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Novel gate stack engineering for high mobility Ge nFETs

dc.contributor.authorArimura, Hiroaki
dc.contributor.authorCott, Daire
dc.contributor.authorLoo, Roger
dc.contributor.authorWostyn, Kurt
dc.contributor.authorBoccardi, Guillaume
dc.contributor.authorFranco, Jacopo
dc.contributor.authorSioncke, Sonja
dc.contributor.authorXie, Qi
dc.contributor.authorTang, Fu
dc.contributor.authorJiang, Xiaoqiang
dc.contributor.authorGivens, Michael
dc.contributor.authorChiu, Eddie
dc.contributor.authorMitard, Jerome
dc.contributor.authorMocuta, Dan
dc.contributor.authorCollaert, Nadine
dc.date.accessioned2021-10-25T16:34:15Z
dc.date.available2021-10-25T16:34:15Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30142
dc.sourceIIOimport
dc.titleNovel gate stack engineering for high mobility Ge nFETs
dc.typeMeeting abstract
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorBoccardi, Guillaume
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorXie, Qi
dc.contributor.imecauthorGivens, Michael
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting
dc.source.conferencedate3/04/2018
dc.source.conferencelocationPhoenix, AZ USA
imec.availabilityPublished - imec


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