Effects on IC quality of 5X reticle repair using FIB with stain reduction

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Authors
Prewett, P. D.; Martin, B.; Watson, J. G.; Jonckheere, Rik
Conference
Integrated Circuit Metrology, Inspection and Process Control VIII
Title
Effects on IC quality of 5X reticle repair using FIB with stain reduction
Publication type
Proceedings paper
Embargo date
9999-12-31
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