Show simple item record

Atom probe tomography for advanced nanoelectronic devices: current status and perspectives

dc.contributor.authorBarnes, J.P.
dc.contributor.authorGrenier, A.
dc.contributor.authorMouton, I.
dc.contributor.authorBarraud, S
dc.contributor.authorAudoit, G.
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDuguay, S.
dc.contributor.authorRoland, N.
dc.contributor.authorVurpillot, F
dc.contributor.authorBlavette, D
dc.date.accessioned2021-10-25T16:39:52Z
dc.date.available2021-10-25T16:39:52Z
dc.date.issued2018
dc.identifier.issn1359-6462
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30208
dc.sourceIIOimport
dc.titleAtom probe tomography for advanced nanoelectronic devices: current status and perspectives
dc.typeJournal article
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.source.peerreviewyes
dc.source.beginpage91
dc.source.endpage97
dc.source.journalScripta Materialia
dc.source.volume148
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S1359646217302440
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record