N7 FinFET self-aligned quadruple patterning modeling

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Authors
Baudot, Sylvain; Guissi, Sofiane; Milenin, Alexey; Ervin, Joe; Schram, Tom
Conference
2018 International Conference on Simulation of Semiconductor Processes and Devices - SISPAD
Title
N7 FinFET self-aligned quadruple patterning modeling
Publication type
Proceedings paper
Embargo date
9999-12-31
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