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The first observation of p-type electromigration failure in full ruthenium interconnects

dc.contributor.authorBeyne, Sofie
dc.contributor.authorDutta, Shibesh
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorBosman, Niels
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-25T16:44:00Z
dc.date.available2021-10-25T16:44:00Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30243
dc.sourceIIOimport
dc.titleThe first observation of p-type electromigration failure in full ruthenium interconnects
dc.typeProceedings paper
dc.contributor.imecauthorBeyne, Sofie
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.beginpage6D.7-1
dc.source.endpage6D.7-9
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate11/03/2018
dc.source.conferencelocationBurlingame, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8353638/
imec.availabilityPublished - imec
imec.internalnotes


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