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On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers

dc.contributor.authorBodgan, Justin
dc.contributor.authorBrady-Boyd, Anita
dc.contributor.authorO'Connor, Robert
dc.contributor.authorArmini, Silvia
dc.contributor.authorSelvaraju, Venkateswaran
dc.contributor.authorHughes, Greg
dc.date.accessioned2021-10-25T16:47:34Z
dc.date.available2021-10-25T16:47:34Z
dc.date.issued2018
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30270
dc.sourceIIOimport
dc.titleOn the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers
dc.typeJournal article
dc.contributor.imecauthorBrady-Boyd, Anita
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecBrady-Boyd, Anita::0000-0002-9257-6837
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpage260
dc.source.endpage266
dc.source.journalApplied Surface Science
dc.source.issueA
dc.source.volume427
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0169433217323437
imec.availabilityPublished - imec


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