Authors

Bodgan, Justin; Brady-Boyd, Anita; O'Connor, Robert; Armini, Silvia; Selvaraju, Venkateswaran; Hughes, Greg

ISSN

0169-4332

Issue

A

Journal

Applied Surface Science

Volume

427

Title

On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers

Publication type

Journal article