Publication:
On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers
Date
| dc.contributor.author | Bodgan, Justin | |
| dc.contributor.author | Brady-Boyd, Anita | |
| dc.contributor.author | O'Connor, Robert | |
| dc.contributor.author | Armini, Silvia | |
| dc.contributor.author | Selvaraju, Venkateswaran | |
| dc.contributor.author | Hughes, Greg | |
| dc.contributor.imecauthor | Brady-Boyd, Anita | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.orcidimec | Brady-Boyd, Anita::0000-0002-9257-6837 | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.date.accessioned | 2021-10-25T16:47:34Z | |
| dc.date.available | 2021-10-25T16:47:34Z | |
| dc.date.issued | 2018 | |
| dc.identifier.issn | 0169-4332 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30270 | |
| dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0169433217323437 | |
| dc.source.beginpage | 260 | |
| dc.source.endpage | 266 | |
| dc.source.issue | A | |
| dc.source.journal | Applied Surface Science | |
| dc.source.volume | 427 | |
| dc.title | On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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