Publication:
On the use of (3-trimethoxysilylpropyl)diethylenetriamine self-assembled monolayers as seed layers for the growth of Mn based copper diffusion barrier layers
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1905 since deposited on 2021-10-25
Acq. date: 2025-10-23
Citations
Metrics
Views
1905 since deposited on 2021-10-25
Acq. date: 2025-10-23
Citations